
为伺服系统的运行提供所需的动力供给。动力转换装置:其作用是根据应用工艺,将输入侧的标准动力给定,经调节后转换成所需的驱动输出,为执行机构驱动机械负载提供相应的可变动力源。传动执行机构:将上述可变动力转换为物体运动所需的机械动力,并传递到目标对象的机械负载上,从而最终驱动其完成各种复杂的运行动作。运控反馈元件:为了能够让运控性能更加接近设备工艺所需要达到的应用指标,伺服系统需要借助反馈装置即时获取应用对象的位置、速度...等运动状态,并将其与预设目标值进行实时比对,然后依据偏差的大小快速调节其动力响应输出。
TOKYO EL TRON TEL ACT8 DC/DC CON PCB CT2981-000610-12
PHILLIPS PE 1138/50U 160 VA 9415 011 38501
RED LION PAXD ****OG INPUT METER M238
APPLIED MATERIALS AMAT CABLE ASSY 0150-30593
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CKD EV2500- FL304500
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KOGANEI TOKYO EL TRON PNEUMATIC DIAPHRAGM VALVE F-D P125-24W CT5012-000143-12
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ESI LASERSCRIBE 9275 9350
NIKON PR ISION S202A
HORIBA ST APPLIED MATERIALS DIGITAL LIQUID MASS FLOW METER LF-F404M-A-EVD
SMC TOKY EL TRON TEL AIR CYLINDER CQ2B50-10D-XB13 024-019242-1
MKS INSTRUMENTS BARATRON PRESSURE TRANSDUCER R750B13TCE2FG
CELERITY INSTRUMENTSTYLAN FC-2979MEP
TOKYO EL TRON TEL CABLE (SPO), FG EPD-SE 2L86-058716-V1
Nikon NSX47
MKS INSTRUMENTS VACUUM GAUGE ConTROLLER 146B-AA000-1
HEINZINGER 4022.428.1984
SVG ASML 90S VACUUM SENSOR PCB 99-80178
SUNX DP2-22Z
APPLIED MATERIALS AMAT ADVANCED ENERGY RF MATCH CABLE 0195-08334
TOKYO EL TRON TO SHOWER PLATE 3M10-151184-12
COSEL PBA50F-5
SVG90S ASML MILLIPORE PUMP ConTROLLER INGEN2PSI
NIKON PR ISION SCANNER 4S064-050
BIO-RAD 26-SLOT ELEVATOR MODULE Y7603203
PALL GAS FILTER GLFF4000VMMB 4KB-U4003-1
MKS INSTRUMENTS GBROR INSITU FLOW VERIFIER 123714-G1
TOKYO EL TRON TEL TIMING BELT 376-2GT-6 CT023-004369-1
MITSUBISHI EL TRIC SERVO DRIVE MR-J2-20A1-511
VARIAN VACUUM MANUAL TURN VALVE L6820-382 NW25
TESCOM REGULATOR 60 PSIG MT001383A
BIO-RAD RUDOLPH T HNOLOGIES A17838
ASML PAS2500